Modeling and Parameter Identification of the Ultraprecision Vibration Isolation System

Modeling and Parameter Identification of the Ultraprecision Vibration Isolation System

DONG Kaka，PU Huayan，XU Zhengao，CHEN Xuedong

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Journal of Wuhan University of Technology ›› 2011, Vol. 33 ›› Issue (1) : 125-129.

Modeling and Parameter Identification of the Ultraprecision Vibration Isolation System

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