溶胶凝胶法制备氧化硅薄膜裂纹形貌研究

溶胶凝胶法制备氧化硅薄膜裂纹形貌研究

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Journal of Wuhan University of Technology ›› 2009, Vol. 31 ›› Issue (11) : 13-15.

材料科学与工程

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