直流溅射ZnO导电靶制备ZnO:Al透明导电薄膜

直流溅射ZnO导电靶制备ZnO:Al透明导电薄膜

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Journal of Wuhan University of Technology ›› 2007, Vol. 29 ›› Issue (4) : 52-54.

材料科学与工程

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